Photochemical etching with tunable VUV radiation

Journal of Electron Spectroscopy and Related Phenomena

Volumn 80, Issue , 1996, Pages 49-54

  Streller, U ^a   Li, B ^a   Krabbe, A ^a   Krause, H P ^a   Twesten, I ^a   Schwentner, N ^a  

^a FREIE UNIVERSITÄT BERLIN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010429609     PISSN: 03682048     EISSN: None     Source Type: Journal    
DOI: 10.1016/0368-2048(96)02920-9     Document Type: Article

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