Kinematic sample mounting system for accurate positioning of transferrable samples

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 18, Issue 5, 2000, Pages 2603-2605

  Lapicki, Adam ^a,b   Boyd, Kevin J ^a,c   Anderson, Scott L ^a  

^a UNIVERSITY OF UTAH   (United States)

^b TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

^c UNIVERSITY OF NEW ORLEANS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010398357     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (1)

1. K. J. Boyd, A. Lapicki, M. Aizawa, and S. L. Anderson, Rev. Sci. Instrum. 69, 4106 (1998).