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Journal of Materials Science and Technology

Volumn 14, Issue 4, 1998, Pages 289-293

Low temperature deposition of titanium nitride

(2) Wen, Lishi a Huang, Rongfang a

a INSTITUTE OF METAL RESEARCH (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010333024 PISSN: 10050302 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (8)

References (47)

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