Evolution of implanted carbon in silicon upon pulsed excimer laser annealing

Applied Physics Letters

Volumn 69, Issue 7, 1996, Pages 969-971

  Kantor Z ^a,b   Fogarassy, E ^a   Grob, A ^a   Grob, J J ^a   Muller, D ^a   Prevot B ^a   Stuck, R ^a  

^a Faculté de Médecine   (France)

^b RESEARCH GROUP ON LASER PHYSICS   (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010316593     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117098     Document Type: Article

References (14)

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