Improvement of crystalline quality of group III nitrides on sapphire using low temperature interlayers

MRS Internet Journal of Nitride Semiconductor Research

Volumn 4, Issue SUPPL. 1, 1999, Pages

  Amano, H ^a   Iwaya, M ^a   Hayashi, N ^a   Kashima, T ^a   Katsuragawa, M ^a   Takeuchi, T ^a   Wetzel, C ^a   Akasaki, I ^a  

^a MEIJO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; LIGHT EMITTING DIODES; METALLORGANIC VAPOR PHASE EPITAXY; MIRRORS; SAPPHIRE; SEMICONDUCTING GALLIUM COMPOUNDS; THERMAL EFFECTS;

BRAGG REFLECTORS; BUFFER LAYERS; HYDROGEN FLOW;

NITRIDES;

EID: 0010308068     PISSN: 10925783     EISSN: None     Source Type: Journal    
DOI: 10.1557/s1092578300003550     Document Type: Conference Paper

References (18)

1. H. P. Maruska and J. J. Tietjen, Appl. Phys. Lett., 15, 327 (1969).
2. J. I. Pankove, E. A. Miller, D. Richman and J. E. Berkeyheiser, J. Lumin., 4, 63 (1971).
3. B. Monemar, Phys. Rev. B10, 676 (1974).
4. H. Amano, N. Sawaki, I. Akasaki and Y. Toyoda, Appl. Phys. Lett. 48, 353 (1986).
5. S. Nakamura, T. Mukai and M. Senoh: J. Appl. Phys. 71, 5543 (1992).
6. H. Amano, M. Kito, K. Hiramatsu, N. Sawaki and I. Akasaki, Jpn. J. Appl. Phys., 28, L2112 (1989).
7. S. Nakamura, M. Senoh and T. Mukai, Jpn. J. Appl. Phys., 30, L1708 (1992).
8. L Akasaki, Proc. Mater. Res. Soc. 482, 3 (1998).
9. S. D. Lester, F. A. Ponce, M. G. Craford and D. A. Steigerwald, Appl. Phys. Lett., 66, 1249 (1995).
10. X. J. Ning, F. R. Chien, P. Pirouz, J. W. Yang and M. A. Khan, J. Mater. Res., 11, 580 (1996).
11. T. Sugahara, H. Sato, M. Hao, Y. Naoi, S. Kurai, S. Tottori, K. Yamashita, K. Nishino, L. T. Romano and S. Sakai, Jpn. J. Appl. Phys., 37, L398 (1998).
12. L. Eastman, K. Chu, W. Schaff, M. Murphy and N. G. Weimann, Internet J. of Nitride Semiconductor Re, 2, 17 (1997).
13. M. Iwaya, T. Takeuchi, S. Yamaguchi, C. Wetzel, H. Amano and I. Akasaki, Jpn. J. Appl. Phys. 37, L316 (1998).
14. M. Iwaya, N. Hayashi, T. Takeuchi, T. Kashima, M. Katsuragwa, H. Kato, S. Yamaguchi, C. Wetzel, H. Amano and I.Akasaki, Jpn. J. Appl. Phys. (to be submitted).
15. H. Amano, M. Iwaya, T. Kashima, M. Katsuragawa, I. Akasaki, J. Han, S. Hearne, J. A. Floro, E. Chason and J. Figiel, Jpn. J. Appl. Phys., 37, (1998)L1540.
16. K. Hirosawa, K. Hiramatsu, N. Sawaki and I. Akasaki, Jpn. J. Appl. Phys., 32, L1039 (1993).
17. J. Floro, E. Chason, S. Lee, R. Twesten, R. Hwang and L. Freud, J. Electron. Mater., 26, 969 (1997).
18. S. Hearne, E. Chason, J. Han, J. Floro, J. Figiel, J. Hunter, H. Amano and I. Tsong, Appl. Phys. Lett., (to be published).