2-Phenylallyl-ended poly(α-methylstyrene): A new positive electron-beam resist

Journal of Photopolymer Science and Technology

Volumn 10, Issue 2, 1997, Pages 321-324

  Nagasaki, Yukio ^a   Yamazaki, Naoki ^a   Kato, Masao ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

2 phenyialiyl ended poly(a methylstyrene); Depolymerization mechanism; Positive electron beam resist

Indexed keywords

EID: 0010251684     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.10.321     Document Type: Article

References (20)

1. a) Ogawa, T., J. Photopolym. Sci. Technol., 9, 379 (1996).
2. b) Thompson, L. F., "An Introduction of Lithography", in "Introduction to Microlithography Second Edition" Thompson, L. F., Willson C. G., Bowden, M. J., Ed., ACS, Washington, DC, 1994, Chap. 1, pp. 1-17.
3. a) Kato, N., Nagasaki, Y., Kato, M., Polym. Adv. Tech., 1, 341(1990).
4. b)Nagasaki, Y., Kalo, N., Yamazaki, N., Kato, M., "A Novel Synthesis of SiliconContaining Polymers and Their Properties as Electron-Beam Resist", in "Siliconcontaining Polymers", Jones, R. G., Ed, The Royal Society of Chemistry, Cambridge, 1996, pp. 44-50.
5. Aoki, H., Tokuda, T., Nagasaki, Y., Kato, M., J. Polym. Sci., Part A, Chem. Ed., in press.
6. Kato, N., Takeda, K., Nagasaki, Y., Kato, M., Ind. Eng. Chem. Res., 33, 417(1994).
7. Nagasaki, Y., Deguchi, K., Yamazaki, N., Kato, M., Macromol. Rapid. Commun., 17, 51(1996)
8. Wilson, C. G., "Organic Resist Materials", in "Introduction to Microlithography 2nd Edition," Thompson, L. F., Willson C. G., Bowden, M. J., Ed., ACS, Washington, DC, 1994, Chap. 3, pp. 139-268.
9. Ito, H., Wilson, C. G., Polym. Eng, Sci., 23, 1012(1983)
10. Ivin, K. J., Léonard, J., Eur. Polym. J., 6, 331(1970)
11. Ito, H.; England, W. P. Polym. Prep., , 31, 427(1990).
12. b) Ito, H.; England, W. P., Ueda, M., J. Photopolym. Sci. Tech., 3, 219(1990)
13. Matyjaszewski, K., "Carbcationic Polymerization: Styrene and Substituted Styrenes", in "Comprehensive Polymer Science", Vol. 3, Pergamon Press, Oxford, 1988, pp. 639-672.
14. Nagasaki, Y., Yamazaki, N., Kato, M., Macromol. Rapid Commun., 17, 123 (1996)
15. Nagasaki, Y., Yamazaki, N., Kato, M., Polymer, 37, 4321(1996)
16. Hatch, L. F., Patton, T. L. J. Am. Chem. Soc., 1954, 27, 2705.
17. a)Sugita, K. Ueno, N., Prag. Polym. Sci., 17, 319 (1992).
18. b) Choong, H. S., Kahn, F. J., J. Vac. Sci. Technol., 19, 1121 (1981)
19. Jones, R. G., Trends in Polymer Science, l, 372 (1993)
20. Müller, A. H. E., "Carbanionic Polymerization: Kinetics and Thermo-dynamics", and Fontanille, M., "Carb-anionic Polymerization: Tennination and Fiinctionalization" in "Comprehensive Polymer Science", Vol. 3, Pergamon Press, Oxford, 1988, pp. 387-433