Characterization of nucleation and growth of MW-CVD diamond films by spectroscopic ellipsometry and ion beam analysis methods

Diamond and Related Materials

Volumn 6, Issue 11, 1997, Pages 1633-1637

  Pinter I ^a   Petrik, P ^b   Szilagyi E ^c   Katai Sz ^b   Deak P ^b  

^a RESEARCH INSTITUTE FOR TECHNICAL PHYSICS AND MATERIALS SCIENCE   (Hungary)

^b BUDAPEST UNIVERSITY OF TECHNOLOGY AND ECONOMICS   (Hungary)

^c WIGNER RESEARCH CENTRE FOR PHYSICS   (Hungary)

Author keywords

Ion beam analysis; MW CVD diamond; Nucleation; Spectroscopic ellipsometry

Indexed keywords

EID: 0010101434     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00029-0     Document Type: Article

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