Gas-phase transport of WF6 through annular nanopipes in TiN during chemical vapor deposition of W on TiN/Ti/SiO2 structures for integrated circuit fabrication

Applied Physics Letters

Volumn 69, Issue 21, 1996, Pages 3179-3181

  Ramanath, G ^a   Carlsson, J R A ^a   Greene, J E ^a   Allen, L H ^a   Hornback, V C ^b   Allman, D J ^b  

^a United States of America   (United States)

^b Symbios Logic   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0010009525     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.117953     Document Type: Article

References (17)

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