Reduced process method for Thin-Film-Transistor Liquid-Crystal Display (TFT-LCD) with dry-etching tapered ITO data bus lines

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 8 SUPPL. B, 1996, Pages

  Ugai, Yasuhiro ^a   Yukawa, Teizo ^a   Hatta, Yoshihisa ^a   Aoki, Shigeo ^a  

^a Hosiden and Philips Display Corp   (Japan)

Author keywords

Hydrogen iodide (HI) gas; ITO data bus line; ITO dry etching; Tapered electrode

Indexed keywords

EID: 0009981482     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.l1027     Document Type: Article

References (7)

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