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Volumn 44, Issue 5, 2000, Pages 309-313
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Texture developing in TiO2/ORMOSIL composite sol-gel films by ECR etching
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Author keywords
Composite; Electron cyclotron resonance; Optical channel waveguides; Organically modified silane; Polymerization; Sol gel technique; Texture structure
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Indexed keywords
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EID: 0009757967
PISSN: 0167577X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0167-577X(00)00050-1 Document Type: Article |
Times cited : (3)
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References (10)
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