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Applied Physics Letters
Volumn 60, Issue 18, 1992, Pages 2267-2269
Lateral straggle of focused-ion-beam implanted Be in GaAs
(6)
Vignaud, D
a
Etchin, S
a
Liao, K S
a
Musil, C R
a
Antoniadis, D A
a
Melngailis, J
a
a
MASSACHUSETTS INSTITUTE OF TECHNOLOGY
(
United States
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
0009737773
PISSN
:
00036951
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.107050
Document Type
:
Article
Times cited : (
9
)
References (
17
)
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1
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