Micro-EDM: A versatile technology for silicon micromachining

International Journal of the Japan Society for Precision Engineering

Volumn 33, Issue 2, 1999, Pages 114-119

  Reynaerts, Dominiek ^a   Van Brussel, Hendrik ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Electrodischarge machining; Microsystems; Three dimensional micro machining

Indexed keywords

EID: 0009592467     PISSN: 0916782X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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