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Applied Physics Letters

Volumn 69, Issue 7, 1996, Pages 916-918

Localized epitaxial growth of hexagonal and cubic SiC films on Si by vacuum annealing

(2) Luo, Jian Shing a Lin, Wen Tai a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009531911 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.116942 Document Type: Article

Times cited : (11)

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