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Journal of Applied Physics

Volumn 69, Issue 12, 1991, Pages 8047-8051

A continuum model for low-pressure radio-frequency discharges

(1) Meyyappan, M a

a Scientific Research Associates Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009403517 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.347451 Document Type: Article

Times cited : (27)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.