Local order of polymer derived amorphous SixCyNz

Journal of Applied Physics

Volumn 83, Issue 11, 1998, Pages 5714-5718

  Uhlig, H ^a   Friess M ^a,b   Lamparter, P ^a,c   Steeb, S ^a,c  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b GERMAN AEROSPACE CENTER DLR   (Germany)

^c MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009349309     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367426     Document Type: Article

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