Light source with orthogonally linear polarized two-frequency beam from laser diode and surface profile measurement

Optical Engineering

Volumn 35, Issue 4, 1996, Pages 1070-1073

  Otani, Yukitoshi ^{a,b,c,d,e,f,g,h}   Tanahashi, Atsushi ^a,h,i   Yoshizawa, Toru ^a,b,c,j  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b SPIE ^*

^c UNIVERSITY OF TOKYO   (Japan)

^d DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

^e HOYA CORPORATION   (Japan)

^f JAPAN SOCIETY OF APPLIED PHYSICS   (Japan)

^g Optical Society of   (Japan)

^h Japan Soc of Precision Engineering

ⁱ TOPCON CORPORATION   (Japan)

^j UNIVERSITY OF YAMANASHI   (Japan)

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Author keywords

Differential interferometer; Frequency modulation; Laser diode; Optical heterodyne interterometry; Surface profilometry

Indexed keywords

EID: 0009090328     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600714     Document Type: Article

References (7)

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3. M. Yonemura, "Wavelength-change characteristics of semiconductor lasers and their application to holographic contouring," Opt. Lett. 10 (1), 1-3 (1985).
4. Y. Ishii, J. Chen, and K. Murata, "Digital phase-measuring interferometry with tunable laser diode," Opt. Lett. 12 (4), 233-235 (1987).
5. T. Kubota, M. Nara, and T. Yoshino, "Interferometer for measuring displacement and distance," Opt. Lett. 12 (5), 310-312 (1987).
6. R. Onodera, and Y. Ishii, "Two-wavelength laser-diode interferometry with electric calibration techniques," Proc. SPIE 1720, 458-463 (1992).
7. A. Tanahashi, Y. Otani, and T. Yoshizawa, "Development of a light source with orthogonally polarized two-frequency beam from a laser diode," Jpn. J. Optics 23 (12), 758-764 (1994) (in Japanese).