SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Electronic Materials

Volumn 25, Issue 9, 1996, Pages 1554-1560

Mass spectroscopy study of GaN metalorganic chemical vapor deposition

(2) Park, Yongjo a Pavlidis, Dimitris a

a University of Michigan (United States)

Author keywords

GaAs; GaN; Mass spectroscopy analysis; Metalorganic chemical vapor deposition (MOCVD)

Indexed keywords

EID: 0008925988 PISSN: 03615235 EISSN: None Source Type: Journal
DOI: 10.1007/bf02655399 Document Type: Article

Times cited : (6)

References (27)

1
- 0000815007
- S. Strite and H. Morkoç, J. Vac. Sci. Technol. B 10, 1237 (1992).
- (1992) J. Vac. Sci. Technol. B , vol.10 , pp. 1237
- Strite, S.¹ Morkoç, H.²

2
- 21544461610
- H. Morkoç, S. Strite, G.B. Gao, M.E. Lin, B. Sverdov and M. Burns, J. Appl. Phys. 76, 1363 (1994).
- (1994) J. Appl. Phys. , vol.76 , pp. 1363
- Morkoç, H.¹ Strite, S.² Gao, G.B.³ Lin, M.E.⁴ Sverdov, B.⁵ Burns, M.⁶

3
- 21544458581
- S. Nakamura, M. Seno and T. Mukai, Appl. Phys. Lett. 62, 2390 (1993).
- (1993) Appl. Phys. Lett. , vol.62 , pp. 2390
- Nakamura, S.¹ Seno, M.² Mukai, T.³

4
- 0027187087
- S. Nakamura, M. Seno and T. Mukai, Jpn. J. Appl. Phys. 32, L8 (1993).
- (1993) Jpn. J. Appl. Phys. , vol.32
- Nakamura, S.¹ Seno, M.² Mukai, T.³

5
- 36749110808
- A.K. Khan, R.A. Skogman, R.G. Schulze and M. Gershenzon, Appl. Phys. Lett. 42, 430 (1983).
- (1983) Appl. Phys. Lett. , vol.42 , pp. 430
- Khan, A.K.¹ Skogman, R.A.² Schulze, R.G.³ Gershenzon, M.⁴

6
- 36549093833
- T. Sasaki and S. Zembutsu, J. Appl. Phys. 2533 (1987).
- (1987) J. Appl. Phys. , pp. 2533
- Sasaki, T.¹ Zembutsu, S.²

7
- 0002701123
- J.E. Butler, N. Bottka, R.S. Sillmon and D.K. Gaskill, J. Cryst. Growth 77, 163 (1986).
- (1986) J. Cryst. Growth , vol.77 , pp. 163
- Butler, J.E.¹ Bottka, N.² Sillmon, R.S.³ Gaskill, D.K.⁴

8
- 0025698286
- C.A. Larsen, N.I. Buchan, S.H. Li and G.B. Stringfellow, J. Cryst. Growth 102, 103 (1990).
- (1990) J. Cryst. Growth , vol.102 , pp. 103
- Larsen, C.A.¹ Buchan, N.I.² Li, S.H.³ Stringfellow, G.B.⁴

9
- 0022029253
- M. Yoshida, H. Watanabe and F. Uesugi, J. Electrochem. Soc. 132, 677 (1985).
- (1985) J. Electrochem. Soc. , vol.132 , pp. 677
- Yoshida, M.¹ Watanabe, H.² Uesugi, F.³

10
- 0026223225
- Q. Chen and P.D. Dapkus, J. Electrochem. Soc. 138, 2821 (1991).
- (1991) J. Electrochem. Soc. , vol.138 , pp. 2821
- Chen, Q.¹ Dapkus, P.D.²

11
- 0024103891
- M. Tirtowidjojo and R. Pollard, J. Cryst. Growth 93, 108 (1988).
- (1988) J. Cryst. Growth , vol.93 , pp. 108
- Tirtowidjojo, M.¹ Pollard, R.²

12
- 0023454336
- P.W. Lee, T.R. Omstead, D.R. McKenna and K.F. Jensen, J. Cryst. Growth 85, 165 (1987).
- (1987) J. Cryst. Growth , vol.85 , pp. 165
- Lee, P.W.¹ Omstead, T.R.² McKenna, D.R.³ Jensen, K.F.⁴

13
- 0025698297
- C.A. Larsen, S.H. Li, N.I. Buchan, G.B. Stringfellow and D.W. Brown, J. Cryst. Growth 102, 126 (1990).
- (1990) J. Cryst. Growth , vol.102 , pp. 126
- Larsen, C.A.¹ Li, S.H.² Buchan, N.I.³ Stringfellow, G.B.⁴ Brown, D.W.⁵

14
- 0024104057
- P.W. Lee, T.R. Omstead, D.R. McKenna and K.F. Jensen, J. Cryst. Growth 93, 134 (1988).
- (1988) J. Cryst. Growth , vol.93 , pp. 134
- Lee, P.W.¹ Omstead, T.R.² McKenna, D.R.³ Jensen, K.F.⁴

15
- 0040744592
- S.P. DenBaars, B.Y. Maa, P.D. Dapkus, A.D. Danner and H.C. Lee, J. Cryst. Growth 77, 188 (1986).
- (1986) J. Cryst. Growth , vol.77 , pp. 188
- DenBaars, S.P.¹ Maa, B.Y.² Dapkus, P.D.³ Danner, A.D.⁴ Lee, H.C.⁵

16
- 0024662678
- D. Mazzarese, A. Tripathi, W.C. Conner, K.A. Jones, L. Calderon and D.W. Eckart, J. Electron. Mater. 18, 369 (1989).
- (1989) J. Electron. Mater. , vol.18 , pp. 369
- Mazzarese, D.¹ Tripathi, A.² Conner, W.C.³ Jones, K.A.⁴ Calderon, L.⁵ Eckart, D.W.⁶

17
- 0011742160
- M. Hashimoto, H. Amano, N. Sawaki and I. Akasaki, J. Cryst. Growth 68, 163 (1984).
- (1984) J. Cryst. Growth , vol.68 , pp. 163
- Hashimoto, M.¹ Amano, H.² Sawaki, N.³ Akasaki, I.⁴

18
- 77951217554
- V.S. Ban, J. Electrochem. Soc. 119, 761 (1972).
- (1972) J. Electrochem. Soc. , vol.119 , pp. 761
- Ban, V.S.¹

19
- 0003129444
- V.S. Ban, J. Cryst. Growth 17, 19 (1972).
- (1972) J. Cryst. Growth , vol.17 , pp. 19
- Ban, V.S.¹

20
- 0029326069
- C.H. Hong, D. Pavlidis, K. Hong and K. Wang, Mater. Sci. Eng. 32, 69 (1995).
- (1995) Mater. Sci. Eng. , vol.32 , pp. 69
- Hong, C.H.¹ Pavlidis, D.² Hong, K.³ Wang, K.⁴

21
- 0021526408
- D.H. Reep and S.K. Ghandhi, J. Electrochem. Soc. 131, 2697 (1984).
- (1984) J. Electrochem. Soc. , vol.131 , pp. 2697
- Reep, D.H.¹ Ghandhi, S.K.²

22
- 0024104441
- D.K. Gaskill, V. Kolubayev, N. Bottaka, R.S. Sillomon and J.E. Butler, J. Cryst. Growth 93, 127 (1988).
- (1988) J. Cryst. Growth , vol.93 , pp. 127
- Gaskill, D.K.¹ Kolubayev, V.² Bottaka, N.³ Sillomon, R.S.⁴ Butler, J.E.⁵

23
- 0001357711
- C.D. Thurmond and R.A. Logan, J. Electrochem. Soc. 119, 622 (1972).
- (1972) J. Electrochem. Soc. , vol.119 , pp. 622
- Thurmond, C.D.¹ Logan, R.A.²

24
- 21544438299
- J. Karpinski, J. Jun and S. Porowski, J. Cryst. Growth 66, 1 (1984).
- (1984) J. Cryst. Growth , vol.66 , pp. 1
- Karpinski, J.¹ Jun, J.² Porowski, S.³

25
- 0018877133
- B. Monemar, O. Lagerstedt and H.P. Gislason, J. Appl. Phys. 51, 625 (1980).
- (1980) J. Appl. Phys. , vol.51 , pp. 625
- Monemar, B.¹ Lagerstedt, O.² Gislason, H.P.³

26
- 0000395858
- G. Jacob, M. Boulou and M. Furtado, J. Cryst. Growth 42, 136 (1977).
- (1977) J. Cryst. Growth , vol.42 , pp. 136
- Jacob, G.¹ Boulou, M.² Furtado, M.³

27
- 0026203532
- S.Z. Sun, E.A. Armour, K. Zheng and C.F. Schaus, J. Cryst. Growth 113, 103 (1991).
- (1991) J. Cryst. Growth , vol.113 , pp. 103
- Sun, S.Z.¹ Armour, E.A.² Zheng, K.³ Schaus, C.F.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.