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1
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24244438838
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June
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J. Li, R. Blewer, and J. W. Mayer, guest editors for MRS Bull. XVIII. June (1993) which is devoted to copper metallization.
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(1993)
MRS Bull.
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Li, J.1
Blewer, R.2
Mayer, J.W.3
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2
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24244433658
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August
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J. Li, T. Seidel, and J. W. Mayer, guest editors for MRS Bull. XIX, August (1994) which is devoted to copper metallization in industry.
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(1994)
MRS Bull.
, vol.19
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Li, J.1
Seidel, T.2
Mayer, J.W.3
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4
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P. J. Ding, W. A. Lanford, S. Hymes, and S. P. Murarka, J. Appl. Phys. 74, 1331 (1994).
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J. Appl. Phys.
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Ding, P.J.1
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Hymes, S.3
Murarka, S.P.4
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5
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P. J. Ding, W. Wang, W. A. Lanford, S. Hymes, and S. P. Murarka, Nucl. Instrum. Methods Phys. Res. B 85, 260 (1994).
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(1994)
Nucl. Instrum. Methods Phys. Res. B
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Ding, P.J.1
Wang, W.2
Lanford, W.A.3
Hymes, S.4
Murarka, S.P.5
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6
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0000507068
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P. J Ding, W. A. Lanford, S. Hymes, and S. P. Murarka, Appl. Phys. Lett. 64, 2897 (1994).
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Appl. Phys. Lett.
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Ding, P.J.1
Lanford, W.A.2
Hymes, S.3
Murarka, S.P.4
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7
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0001072649
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W. A. Lanford, P. J. Ding, W. Wang, S. Hymes, and S. P. Murarka, Thin Solid Films 41, 192 (1995).
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(1995)
Thin Solid Films
, vol.41
, pp. 192
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Lanford, W.A.1
Ding, P.J.2
Wang, W.3
Hymes, S.4
Murarka, S.P.5
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8
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5844266929
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W. Wang, P. J. Ding, S. P. Murarka, and W. A. Lanford, Chem. Eng. Commun. 152-53, 253 (1996).
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(1996)
Chem. Eng. Commun.
, vol.53-152
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Wang, W.1
Ding, P.J.2
Murarka, S.P.3
Lanford, W.A.4
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10
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84972048135
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J. M. E. Harper, E. G. Colgan, C-K. Hu, J. P. Hummel, L. P. Buchwalter, and C. E. Uzoh, MRS Bull. XIX, 23 (1994).
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(1994)
MRS Bull.
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Harper, J.M.E.1
Colgan, E.G.2
Hu, C.-K.3
Hummel, J.P.4
Buchwalter, L.P.5
Uzoh, C.E.6
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11
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0011403112
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R. Nandan, S. P. Murarka, A. Pant, C. Shepard, and W. A. Lanford, Mater. Res. Soc. Symp. Proc. 260, 929 (1992).
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(1992)
Mater. Res. Soc. Symp. Proc.
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Nandan, R.1
Murarka, S.P.2
Pant, A.3
Shepard, C.4
Lanford, W.A.5
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12
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0010372756
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F. Stillesjo, S. Olafsson, P. Isberg, and B. Hjorvarsson, J. Appl. Phys. 7, 8139 (1995).
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J. Appl. Phys.
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Stillesjo, F.1
Olafsson, S.2
Isberg, P.3
Hjorvarsson, B.4
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