Reference-beam system for measuring relative small-surface local irregularities of a reflective object

Applied Optics

Volumn 37, Issue 7, 1998, Pages 1135-1139

  Cywiak, Moisés ^a   Solano, Cristina ^a  

^a CENTRO DE INVESTIGACIONES EN ÓPTICA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008759333     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.37.001135     Document Type: Article

References (5)

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2. J. Mignot and C. Gorecki, Measurement of surface roughness comparison between a defect of focus optical technique and the classical stylus technique, ” Wear 87, 39-49 (1993).
3. J. C. Stover and S. A. Serati, “Calculation of surface statistics from light scatter, ” Opt. Eng. 23, 406-412 (1984).
4. G. E. Sommargren, “Optical heterodyne profilometry, ” Appl. Opt. 20, 610-618 (1981).
5. W. M. Shi, S.-P. Lim and K. S. Lee, “Surface roughness classification using pattern recognition theory, ” Opt. Eng. 34, 1756-1760 (1995).