Large-area production of solar absorbent multilayers by MF-pulsed plasma technology

Vacuum

Volumn 59, Issue 2-3, 2000, Pages 825-835

  Milde, F ^a   Dimer, M ^a   Hecht, Ch ^a   Schulze, D ^a   Gantenbein, P ^b  

^a Von Ardenne Anlagentechnik GmbH   (Germany)

^b SPF Ingenieurschule Rapperswil ITR   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008684078     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(00)00353-5     Document Type: Article

References (9)

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4. Harding GL. J Vac Sci Technol 1976;13:1070.
5. Gampp R, Oelhafen P, Gantenbein P, Brunold S, Frei U. Solar Energy Mater. Solar Cells 1998;54:369-77.
6. Gampp R, Oelhafen P, Gantenbein P, Brunold S, Frei U. Accelerated aging tests of chromium-containing amorphous hydrogenated carbon coatings for solar collectors. Paper presented at the International Symposium on Optical Materials Technology for Energy Efficiency and Solar Energy Conversion XV, Freiburg, FRG, 1996.
7. Patent DE 197 26 966 C1.
8. Geng J, Schüler A, Oelhafen P, Gantenbein P. Changing TiN film morphology by 'plasma biasing'. J Appl Phys to be published.
9. Dimer M, Schulze D, Strümpfel J, Gantenbein P. In: Bakish R, Reno, editors. Proceedings of the International Conference on Vacuum Web Coating, 1998, p. 135.