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Volumn 36, Issue 6, 1997, Pages 1770-1778

Approach to improve the angle sensitivity and resolution of the optical beam deflection method using a passive interferometer and a Ronchi grating

Author keywords

Beam deflection sensing; Detection limits; Optical sensors; Super resolution

Indexed keywords


EID: 0008545897     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601321     Document Type: Article
Times cited : (13)

References (13)
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    • Putman, C.A.J.1    De Grooth, B.G.2    Van Hulst, N.F.3    Greve, J.4
  • 4
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    • J. C. Murphy and L. C. Aamodt, "Photothermal spectroscopy using optical beam probing: mirage effect," J. Appl. Phys. 51(9), 4580-4588 (1980).
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    • Murphy, J.C.1    Aamodt, L.C.2
  • 5
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    • Theory of thermal diffusivity determination by the 'Mirage' technique in solids
    • A. Salazar, A. Sanchez-Lavega, and J. Fernandez, "Theory of thermal diffusivity determination by the 'Mirage' technique in solids," J. Appl. Phys. 65(11), 4150-4156 (1989).
    • (1989) J. Appl. Phys. , vol.65 , Issue.11 , pp. 4150-4156
    • Salazar, A.1    Sanchez-Lavega, A.2    Fernandez, J.3
  • 6
    • 3743055431 scopus 로고
    • Optical beam deflection imaging of the electron beam interaction volume in semiconductors
    • G. Y. Chang, R. B. Givens, J. W. M. Spicer, R. Osiander, and J. C. Murphy, "Optical beam deflection imaging of the electron beam interaction volume in semiconductors," Appl. Phys. Lett. 63(5), 645-647 (1993).
    • (1993) Appl. Phys. Lett. , vol.63 , Issue.5 , pp. 645-647
    • Chang, G.Y.1    Givens, R.B.2    Spicer, J.W.M.3    Osiander, R.4    Murphy, J.C.5
  • 7
    • 0012263643 scopus 로고
    • Calibration of scanning tunneling microscope transducers using optical beam deflection
    • G. C. Wetsel, Jr., S. E. McBride, R. J. Warmack, and B. Van de Sande, "Calibration of scanning tunneling microscope transducers using optical beam deflection," Appl. Phys. Lett. 55(6), 528-530 (1989).
    • (1989) Appl. Phys. Lett. , vol.55 , Issue.6 , pp. 528-530
    • Wetsel Jr., G.C.1    McBride, S.E.2    Warmack, R.J.3    Van De Sande, B.4
  • 8
    • 0007122994 scopus 로고    scopus 로고
    • A specialized torsion balance designed to measure the absolute flux density of hyperthermal molecular beams containing reactive species
    • S. R. Cook, M. A. Hoffbauer, and J. B. Cross, "A specialized torsion balance designed to measure the absolute flux density of hyperthermal molecular beams containing reactive species," Rev. Sci. Instrum. 67(5), 1781-1789 (1996).
    • (1996) Rev. Sci. Instrum. , vol.67 , Issue.5 , pp. 1781-1789
    • Cook, S.R.1    Hoffbauer, M.A.2    Cross, J.B.3
  • 9
    • 0027653166 scopus 로고
    • Profile testing of spherical surfaces by laser deflectometry
    • and references therein
    • M. Rosete-Aguilar and R. Díaz Uribe, "Profile testing of spherical surfaces by laser deflectometry," Appl. Opt. 32(25), 4690-4697 (1993), and references therein.
    • (1993) Appl. Opt. , vol.32 , Issue.25 , pp. 4690-4697
    • Rosete-Aguilar, M.1    Díaz Uribe, R.2
  • 10
    • 3743108922 scopus 로고
    • Optical generation and detection of elastic waves in solids
    • (Paris), Colloque C7-4
    • D. Royer, M. H. Norory, and M. Fink, "Optical generation and detection of elastic waves in solids," J. Phys. III (Paris), Colloque C7-4, 673-680 (1995).
    • (1995) J. Phys. III , pp. 673-680
    • Royer, D.1    Norory, M.H.2    Fink, M.3
  • 11
    • 3743140169 scopus 로고
    • Position sensing of a gaussian beam with a power meter and a knife edge
    • R. Diaz-Uribe, M. Rosete-Aguilar, and R. Ortega-Martinez, "Position sensing of a gaussian beam with a power meter and a knife edge," Rev Mex. Fís. 39(3), 484-492 (1993).
    • (1993) Rev Mex. Fís. , vol.39 , Issue.3 , pp. 484-492
    • Diaz-Uribe, R.1    Rosete-Aguilar, M.2    Ortega-Martinez, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.