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Volumn 148, Issue 5, 2001, Pages

Carbon Enhancement of SiO2 Nucleation in Buried Oxide Synthesis Computer Simulations and Secondary Ion Mass Spectroscopy Depth Profiling

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0008523341     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1362550     Document Type: Article
Times cited : (3)

References (12)
  • 12
    • 0442295052 scopus 로고
    • Yu. A. Ryzhov, Editor, Moscow Physics and Engineering Institute, Moscow
    • A. A. Efremov and G. Ph. Romanova, in Proceedings of the IX All-Union Conference, Vol. 1, Yu. A. Ryzhov, Editor, p. 265, Moscow Physics and Engineering Institute, Moscow (1989).
    • (1989) Proceedings of the IX All-Union Conference , vol.1 , pp. 265
    • Efremov, A.A.1    Romanova, G.Ph.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.