Characterization of the noise in secondary ion mass spectrometry depth profiles

Journal of Applied Physics

Volumn 80, Issue 12, 1996, Pages 7104-7107

  Chu, D P ^a   Dowsett, M G ^a   Cooke, G A ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008454745     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363722     Document Type: Article

References (11)

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2. M. G. Dowsett, G. Rowlands, P. N. Allen, and R. D. Barlow, Surf. Interface Anal. 21, 310 (1994).
3. M. G. Dowsett, R. D. Barlow, and P. N. Allen, J. Vac. Sci. Technol. 12, 186 (1994).
4. G. A. Cooke, M. G. Dowsett, P. N. Allen, R. Collins, and K. Miethe, J. Vac. Sci. Technol. B 14, 132 (1996).
5. S. O. Rice, in Selected Papers on Noise and Stochastic Processes, edited by N. Wax (Dover, New York, 1954), p. 133.
6. E. T. Jaynes, in Maximum-Entropy and Bayesian Spectral Analysis and Estimation Problems, edited by C. R. Smith and G. J. Erickson (Reidel Dordrecht, Holland, 1987), p. 1.
7. L. Cohen, Time-Frequency Analysis (Prentice Hall PTR, Englewood Cliffs, NJ, 1995).
8. G. M. Viswanathan, V. Afanasyev, S. V. Buldyrev, E. J. Murphy, P. A. Prince, and H. E. Stanley, Nature 381, 413 (1996).
9. See A. Benninghoven, F. G. Rüdenauer, and H. W. Werner, Secondary Ion Mass Spectrometry (Wiley, New York, 1987), p. 1056 and the references thereafter.
10. J. B. Clegg, A. E. Morgan, H. A. M. de Grefte, F. Simondet, A. Huber, G. Blackmore, M. G. Dowsett, D. E. Sykes, C. W. Magee, and V. R. Deline, Surf. Interface Anal. 6, 162 (1984).
11. J. W. Tukey, P. Bloomfield, D. Brillinger, and W. S. Cleveland, The Practice of Spectrum Analysis, notes on a course given in Princeton, N J, in December, 1980.