Effects of oxidation conditions on electrical properties of SiC-SiO 2 interfaces

Journal of Applied Physics

Volumn 68, Issue 12, 1990, Pages 6304-6308

  Zaima, S ^a   Onoda, K ^a   Koide, Y ^a   Yasuda, Y ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008281960     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.346873     Document Type: Article

References (11)