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Journal of Applied Physics

Volumn 71, Issue 8, 1992, Pages 4019-4024

Analysis of diamond phase in hydrogenated hard carbon film using radio frequency plasma etching

(3) Shimada, Yoshihito a Mutsukura, Nobuki a Machi, Yoshio a

a TOKYO DENKI UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008135489 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.350848 Document Type: Article

Times cited : (33)

References (45)

1
- 0018806877
- (1979) Thin Solid Films , vol.63 , pp. 155
- Andersson, L.P.¹ Berg, S.² Norstrom, H.³ Olaison, R.⁴ Towata, S.⁵

2
- 0001681578
- (1985) J. Appl. Phys. , vol.57 , pp. 5420
- Lamb, J.D.¹ Woollam, J.A.²

3
- 0020476725
- (1982) Thin Solid Films , vol.91 , pp. 81
- Bubenzer, A.¹ Dischler, B.² Nyaiesh, A.³

4
- 0018335754
- (1980) J. Non-Cryst. Solids , vol.35-36 , pp. 435
- Meyerson, B.¹ Smith, F.W.²

5
- 36549103311
- (1990) J. Appl. Phys. , vol.67 , pp. 487
- Zou, J.W.¹ Schmidt, K.² Reichelt, K.³ Dischler, B.⁴

6
- 0018208012
- (1979) Thin Solid Films , vol.58 , pp. 107
- Holland, L.¹ Ojha, S.M.²

7
- 0009355530
- (1988) J. Phys. D, Appl. Phys. , vol.21 , pp. 995
- Fabisiak, K.¹ Rozploch, F.² Wieczorek, J.³

8
- 0020799564
- (1983) J. Appl. Phys. , vol.54 , pp. 4590
- Bubenzer, A.¹ Dischler, B.² Brandt, G.³ Koidl, P.⁴

9
- 36549099068
- (1985) Appl. Phys. Lett. , vol.46 , pp. 739
- Sah, R.E.¹ Dischler, B.² Bubenzer, A.³ Koidl, P.⁴

10
- 0343709817
- (1988) J. Appl. Phys. , vol.62 , pp. 6668
- Joshi, A.¹ Gangal, S.A.² Kulkarni, S.K.³

11
- 0020829528
- (1983) Solid State Commun. , vol.48 , pp. 105
- Dischler, B.¹ Bubenzer, A.² Koidl, P.³

12
- 0021757234
- (1984) Thin Solid Films , vol.119 , pp. 121
- Woollam, J.A.¹ Natarajan, V.² Lamb, J.³ Khan, A.A.⁴ Bu-Abbud, G.⁵ Mathine, D.⁶ Rubin, D.⁷ Dillon, R.O.⁸

13
- 36549097055
- (1989) J. Appl. Phys. , vol.65 , pp. 3914
- Zou, J.W.¹ Reichelt, K.² Schmidt, K.³ Dischler, B.⁴

14
- 49049146107
- (1981) Thin Solid Films , vol.80 , pp. 227
- Enke, K.¹

15
- 0019575688
- (1982) Thin Solid Films , vol.92 , pp. 55
- Weissmantel, C.¹

16
- 0015080715
- (1971) J. Appl. Phys. , vol.42 , pp. 2953
- Aisenberg, S.¹ Chabot, R.²

17
- 0343034335
- (1978) Nature , vol.275 , pp. 634
- Freeman, J.H.¹ Temple, W.² Gard, G.A.³

18
- 0020194632
- (1982) Thin Solid Films , vol.96 , pp. 31
- Weissmantel, C.¹ Bewilogua, K.² Breure, K.³ Dietrich, D.⁴ Ebersbach, U.⁵ Erler, H.J.⁶ Rau, B.⁷ Reisse, G.⁸

19
- 0021505042
- (1984) Thin Solid Films , vol.120 , pp. 231
- Oelhafen, P.¹ Freeouf, J.L.² Harper, J.M.³ Cuomo, J.-J.⁴

20
- 84911635560
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 319
- Namba, Y.¹ Mori, T.²

21
- 84953828497
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2307
- Fames, J.¹

22
- 36149053661
- (1965) J. Sci. Instrum. , vol.42 , pp. 753
- Nobes, M.¹

23
- 0013240488
- (1985) J. Appl. Phys. , vol.58 , pp. 1693
- Kitabatake, M.¹ Wasa, K.²

24
- 0020115351
- (1983) J. Vac. Sci. Technol. A , vol.1 , pp. 305
- Zelez, J.¹

25
- 84896388503
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 2386
- Sawides, N.¹ Window, B.²

26
- 84957283668
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2303
- Scaglione, S.¹ Emilioni, G.²

27
- 0021472753
- (1984) Thin Solid Films , vol.118 , pp. 311
- Angus, J.C.¹ Stultz, J.E.² Shiller, P.J.³ MacDonald, J.R.⁴ Mirtich, M.J.⁵ Domitz, S.⁶

28
- 0022810595
- (1986) Thin Solid Films , vol.144 , pp. 265
- Catherine, Y.¹ Couderc, P.²

29
- 0018211730
- (1979) Thin Solid Films , vol.58 , pp. 117
- Berg, S.¹ Andersson, L.P.²

30
- 0000811356
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2311
- Kokaku, Y.¹ Kitoh, M.²

31
- 0021427053
- (1984) Vacuum , vol.34 , pp. 523
- Nyaiesh, A.R.¹ Holland, L.²

32
- 0021374872
- (1984) J. Appl. Phys. , vol.55 , pp. 764
- Smith, F.W.¹

33
- 0141659428
- (1983) J. Vac. Sci. Technol. A , vol.1 , pp. 1877
- Green, A.K.¹ Rehn, V.²

34
- 0018986361
- (1981) J. Vac. Sci. Technol. , vol.18 , pp. 226
- Moravec, T.J.¹ Orrent, T.W.²

35
- 84914393358
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 365
- Mathine, D.¹ Dillon, R.O.² Khan, A.Z.³ Abbud, G.B.⁴ Woollan, J.A.⁵ Liu, D.C.⁶ Barzks, B.⁷ Domitz, S.⁸

36
- 84955050891
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 2809
- Mizokawa, Y.¹ Miyasato, T.² Nakamura, S.³ Geib, K.M.⁴ Wilmsen, C.W.⁵

37
- 0023998167
- (1988) Thin Solid Films , vol.158 , pp. 233
- Kobayashi, K.¹ Mutsukura, N.² Machi, Y.³

38
- 0039616972
- (1976) Appl. Phys. Lett. , vol.29 , pp. 118
- Spencer, E.G.¹ Schmidt, P.H.² Joy, D.C.³ Sansalone, F.J.⁴

39
- 0019621815
- (1981) J. Appl. Phys. , vol.52 , pp. 6151
- Vora, H.¹ Moravec, T.J.²

40
- 0019060771
- (1980) Thin Solid Films , vol.72 , pp. 19
- Weissmantel, C.¹

41
- 33645248377
- (1980) Sov. Phys. Tech. Phys. , vol.25 , pp. 103
- Zorin, E.I.¹

42
- 0022669003
- (1986) J. Appl. Phys. , vol.59 , pp. 910
- Kobayashi, K.¹ Mutsukura, N.² Machi, Y.³

43
- 0023641799
- (1987) Thin Solid Films , vol.146 , pp. 93
- Couperc, P.¹ Catherine, Y.²

44
- 35949024697
- (1986) Phys. Rev. B , vol.33 , pp. 1340
- Morar, J.F.¹ Himpsel, F.J.² Hollinger, G.³ Jordan, J.L.⁴ Hughes, G.⁵ McFeely, F.R.⁶

45
- 84911609032
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 36
- Namba, Y.¹ Wie, J.² Mohri, T.³ Heidarpour, E.A.⁴

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