Comparative studies of SIMS and SNMS analyses during the build up of sputter equilibrium under oxygen and rare gas ion bombardment

Fresenius' Journal of Analytical Chemistry

Volumn 358, Issue 1-2, 1997, Pages 47-50

  Breuer, U ^a   Holzbrecher, H ^a   Gastel, M ^a   Becker, J S ^a   Dietze, H J ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008096838     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002160050342     Document Type: Article

References (13)

1. Wittmaack K (1992) In: Practical Surface Analysis, vol. 2nd ed, Briggs D, Seah MP (eds), Wiley
2. Wittmaack K (1981) Surf Sci 112:168
3. Tsai JCC, Morabito JM (1974) Surf Sci 44:247
4. Bartella J, Oechsner H (1983) Surf Sci 126:581
5. Miteva V, Karpuzov D, Ivanov P, Angelova St (1994) Nuc Inst Meth B 85:340
6. Albers Th, Neumann M, Lipinsky D, Wiedmann L, Benninghoven A (1994) SIA 22:9
7. Colligon JS, Kheyrandish H, Walls JM, Wolstenholme J (1991) Thin solid films 200 293
8. Bayly AR, Wolstenholme J, Petts CR (1994) SIA 21:414
9. Wittmaack K (1979) JVST 16:1027
10. Schulz F, Wittmaack K (1976) Rad Eff 29:31
11. Wittmaack K (1985) Nuc Inst Meth B7/8: 779
12. Breuer U, Holzbrecher H, Gastel M, Becker JS, Dietze H-J (1995) Fresenius J Anal Chem 353:372
13. Breuer U (1994) In: Secondary Ion Mass Spectrometry SIMS IX, Benninghoven A, Nihei Y, Shimizu R, Werner HW (eds), Wiley, p 162