Organochloride chemically enhanced focused ion beam micromachining of permalloy

Applied Physics Letters

Volumn 68, Issue 26, 1996, Pages 3829-3831

  Thaus, D M ^a   Stark, T J ^a   Griffis, D P ^a   Russell, P E ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008011404     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116631     Document Type: Article

References (13)

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