Simple microwave preionization source for ohmic plasmas

Review of Scientific Instruments

Volumn 71, Issue 7, 2000, Pages 2728-2732

  Choe, W ^a   Kwon, Gi Chung ^a   Kim, Junghee ^a   Kim, Jayhyun ^a   Jeon, Sang Jean ^a   Huh, Songwhe ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0008000668     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1150682     Document Type: Article

References (6)

1. S. Chilukuri and W. L. Lichten, Rev. Sci. Instrum. 50, 256 (1979).
2. D. Henke and R. Hentschel, Rev. Sci. Instrum. 63, 2538 (1992).
3. S. Fiedler and H. P. Winter, Rev. Sci. Instrum. 63, 2532 (1992).
4. M. A. Brewer, I. G. Brown, M. R. Dickinson, J. E. Galvin, R. A. MacGill, and M. C. Salvadori, Rev. Sci. Instrum. 63, 3389 (1992).
5. H. R. Garner, T. Ohkawa, A. M. Howald, A. W. Leonard, L. S. Peranich, and J. R. D'Aoust, Rev. Sci. Instrum. 61, 724 (1990).
6. 6 LG Electronics (private communication).