At-wavelength characterization of an extreme ultraviolet camera from low to mid-spatial frequencies with a compact laser plasma source

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2462-2466

  Ray Chaudhuri, A K ^a   Krenz, K D ^a   Fields, C H ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007914514     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589667     Document Type: Article

References (14)

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