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Journal of Applied Physics

Volumn 76, Issue 1, 1994, Pages 142-147

Wall-induced effects in gas transport through micromachined channels in silicon

(3) Lundstrom I a Norberg, P a Petersson, L G a

a LINKÖPING UNIVERSITY (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007779487 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.357119 Document Type: Article

Times cited : (10)

References (10)

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2
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- Pfahler, J.¹ Harley, J.² Bau, H.H.³ Zemel, J.⁴

3
- 84950532488
- edited by D. Cho, R. Warrington, Jr., C. Blechinger, A. Pisano, W. Trimmer, and L. Trefethan, DSC Vol. 19 American Society of Mechanical Engineers, New York
- (1990) Microstructures, Sensors and Actuators , pp. 149
- Pfahler, J.¹ Harley, J.² Bau, H.H.³ Zemel, J.⁴

4
- 0002009421
- edited by G. Scoles, D. Bassi, U. Buck, and D. Lainé Oxford University Press, New York
- (1988) Atomic and Molecular Beam Methods , vol.1 , pp. 83
- Pauly, H.¹

5
- 0017981706
- (1978) Vacuum , vol.28 , pp. 269
- Steckelmacher, W.¹

6
- 0028194040
- (1994) Vacuum , vol.45 , pp. 139
- Norberg, P.¹ Petersson, L.-G.² Lundström, I.³

7
- 0000819359
- (1991) Surf. Sci. Rep. , vol.12 , pp. 133
- Vidali, G.¹ Ihm, G.² Kim, H.-Y.³ Cole, M.W.⁴

8
- 1542501083
- (1979) Surf. Sci. , vol.90 , pp. 162
- Engel, T.¹ Kuipers, H.²

9
- 0001168643
- (1965) J. Vac. Sci. Technol. , vol.2 , pp. 182
- Edmonds, T.¹ Hobson, J.P.²

10
- 16244372481
- (1975) J. Chem. Phys. , vol.63 , pp. 2882
- Spencer, J.L.¹ Brown, L.F.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.