Infrared spectroscopic study of decomposition of Ti(N(CH3)2)4

Journal of the Electrochemical Society

Volumn 148, Issue 3, 2001, Pages

  Driessen, Joost P A M ^a   Schoonman, Joop ^a   Jensen, Klavs F ^a  

^a TNO   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007603463     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1350687     Document Type: Article

References (3)

1. H.-E. Cheng and M.-H. Hon, J. Appl. Phys., 79, 8047 (1996).
2. M. Eizenberg, K. Littau, S. Ghanayem, A. Mak, Y. Maeda, M. Chang, and A. K. Sinha, Appl. Phys. Lett., 65, 2416 (1994).
3. I. J. Raaijmakers, R. N. Vrtis, J. Yang, S. Ramaswami, A. Lagendijk, D. A. Roberts, and E. K. Broadbent, Proc. MRS Spring Meeting, San Francisco (1992).