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Volumn 74, Issue 11, 1993, Pages 6599-6602
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Electrical activation of boron coimplanted with carbon in a silicon substrate
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0007534049
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.355098 Document Type: Article |
Times cited : (13)
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References (16)
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