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Volumn 3, Issue 6, 1988, Pages 863-866

Fundamental properties of radiofrequency and microwave surface-wave induced plasmas

Author keywords

Microwave induced plasma; Plasma characteristics; Radiofrequency induced plasma; Surface wave plasma

Indexed keywords


EID: 0007516178     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/ja9880300863     Document Type: Article
Times cited : (18)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.