Blazed holographic diffraction grating fabrication using as2se3 inorganic photoresist

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3573, Issue , 1998, Pages 457-460

  Romanenko, P F ^a   Sopinski, M V ^a   Indutnyi, I Z ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

Blazed grating; Holographic diffraction grating; Inorganic photoresist; Spectral device

Indexed keywords

DIFFRACTION; ETCHING; FABRICATION; HOLOGRAPHY; LIGHT; PHOTORESISTS;

ADDITIONAL TREATMENT; ASYMMETRIC GROOVES; BLAZED GRATING; HOLOGRAPHIC DIFFRACTION GRATINGS; INORGANIC PHOTORESISTS; PHOTORESIST MATERIALS; SPECTRAL DEPENDENCY; SPECTRAL DEVICE;

DIFFRACTION GRATINGS;

EID: 0007232416     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.324564     Document Type: Conference Paper

References (6)

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