Stress Effects in Boron-Implanted Polysilicon Films

Journal of the Electrochemical Society

Volumn 131, Issue 10, 1984, Pages 2443-2446

  Choi, Min S ^a   Hearn, Eric W ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007082430     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2115314     Document Type: Article

References (11)

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