Atom probe determination of the multicomponent material thermo-field microprotrusion parameters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 495-498

  Kontorovich, E L ^a   Loginov, M V ^a   Shrednik, V N ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007040030     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589607     Document Type: Article

References (12)

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10. V. N. Shrednik and O. L. Golubev, in Proceedings of the XVI International Symposium on Discharges and Electrical Insulation in Vacuum (ISDEIV) Russia, 1994 (unpublished), p. 473.
11. V. G. Bulenko, Yu. A. Vlasov, O. L. Golubev, and V. N. Shrednik, Surf. Sci. 266, 165 (1992).
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