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Volumn 79, Issue 7, 1996, Pages 3470-3476

High-dose phenomena in zinc-implanted silicon crystals

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0006971678     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361395     Document Type: Article
Times cited : (15)

References (37)
  • 3
    • 5244230384 scopus 로고
    • Crucial Issues in Semiconductor Materials and Processing Technologies, edited by S. Coffa, F. Priolo, E. Rimini, and J. M. Poate, Kluwer, Dordrecht
    • A. Battaglia, C. Spinella, F. Priolo, and S. U. Campisano, in Crucial Issues in Semiconductor Materials and Processing Technologies, edited by S. Coffa, F. Priolo, E. Rimini, and J. M. Poate, NATO ASI Ser. E: Appl. Sci. Vol. 222 (Kluwer, Dordrecht, 1991), p. 523.
    • (1991) NATO ASI Ser. E: Appl. Sci. , vol.222 , pp. 523
    • Battaglia, A.1    Spinella, C.2    Priolo, F.3    Campisano, S.U.4
  • 19
  • 27
    • 5244267642 scopus 로고
    • Proceedings of the Fourth International Conferences on Ion Implantation Equipment and Techniques, edited by H. Ryssel and H. Glawisching, Springer, Berlin
    • T. C. Smith, in Proceedings of the Fourth International Conferences on Ion Implantation Equipment and Techniques, edited by H. Ryssel and H. Glawisching, Springer Series in Electrophysics Vol. 11 (Springer, Berlin, 1983).
    • (1983) Springer Series in Electrophysics , vol.11
    • Smith, T.C.1
  • 35
  • 36
    • 5244325253 scopus 로고
    • McGraw-Hill, New York; Russian edition "Metallurgiya," Moscow
    • R. P. Elliott, Constitution of Binary Alloys. First Supplement (McGraw-Hill, New York; Russian edition "Metallurgiya," Moscow, 1970), Vol. 2, p. 419.
    • (1970) Constitution of Binary Alloys , vol.2 , Issue.1 SUPPL. , pp. 419
    • Elliott, R.P.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.