Compensation doping of polysilicon films for stable integrated circuit resistors

Solid State Phenomena

Volumn 51-52, Issue , 1996, Pages 561-566

  Rydberg, M ^a,b   Smith, U ^a,b   Soderbarg A ^a   Hansson, H ^b  

^a UPPSALA UNIVERSITY   (Sweden)

^b ERICSSON RADIO SYSTEMS AB   (Sweden)

Author keywords

Compensation Doping; Hydrogen Sensitivity; Scanning Probe Microscope; Thermal and Electrical Stress; Thin Film Resistor

Indexed keywords

EID: 0006951692     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.51-52.561     Document Type: Article

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