Fringe-pattern analysis with high accuracy by use of the Fourier-transform method: Theory and experimental tests

Applied Optics

Volumn 40, Issue 13, 2001, Pages 2081-2088

  Massig, Juergen H ^a   Heppner, Joachim ^b  

^a AALEN UNIVERSITY   (Germany)

^b CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; ERROR ANALYSIS; EXTRAPOLATION; FOURIER TRANSFORMS; INTERFEROMETERS;

FRINGE-PATTERN ANALYSIS;

OPTICS;

EID: 0006869042     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.40.002081     Document Type: Article

References (10)

1. M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am 72, 156-160 (1982).
2. M. KUchel, “The new Zeiss interferometer,” in Optical Testing and Metrology III: Recent Advances in Industrial Inspection, C. P. Grover, ed., Proc. SPIE 1332, 665-663 (1990).
3. L. Mertz, “Real-time fringe-pattern analysis,” Appl. Opt. 22, 3977-3982 (1983).
4. K. H. Womack, “Interferometric phase measurement using spatial synchronous detection,” Opt. Eng. 23, 391-395 (1984).
5. E. O. Brigham, The Fast Fourier Transform (Prentice-Hall, Englewood Cliffs, N.J., 1974), pp. 102-105.
6. D. J. Bone, H.-A. Bachor, and R. J. Sandeman, “Fringe-pattern analysis using a 2-D Fourier transform,” Appl. Opt. 25, 1653-1660 (1986).
7. T. Kreis, Holographic Interferometry, W. Juptner and W. Osten, eds. (Akademie-Verlag, Berlin, 1996), Chap. 4.6, pp. 141-142.
8. E. O. Brigham, The Fast Fourier Transform (Prentice-Hall, Englewood Cliffs, N.J., 1974), pp. 115-118.
9. M. Kujawinska and J. Wojciak, “High accuracy Fourier transform fringe pattern analysis,” Opt. Lasers Eng. 14, 325-339 (1991).
10. C. Roddier and F. Roddier, “Interferogram analysis using Fourier transform techniques,” Appl. Opt. 26, 1668-1673 (1987).