Surface hardening of Al by high current Fe-ion implantation

Journal of Applied Physics

Volumn 82, Issue 5, 1997, Pages 2209-2214

  Gao, K Y ^a   Liu, B X ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006850439     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366027     Document Type: Article

References (8)

1. See, for example, Ion Beam Modification of Materials, edited by R. E Benenson, E. N. Kaufmann, G. L. Miller, and W. W Scholz (North Holland, Amsterdam, 1981).
2. M. Nahenow, Ion Implantation: Equipment and Techniques, edited by H. Ryssel and H. Glawischnig (Springer, Berlin, 1983) p. 31.
3. I. G. Brown, J. E. Gavin, and R. A. MacGill, Appl. Phys. Lett. 62, 358 (1985).
4. X. J. Zhang, F. S. Zhou, H. X. Zhang, S. J. Zhang, Q. Li, and Z. E. Han, Rev. Sci. Instrum. 64, 2431 (1992).
5. D. H. Zhu and B. X. Liu, J. Appl. Phys. 77, 6257 (1995).
6. C. W. Draper and J. M. Poate, Int. Mater. Res. 30, 85 (1985).
7. Y. G. Li, Y. L. Zhang, and Y. X. Liou, J. Mater. Sci. 30, 2635 (1995).
8. J. F. Ziegler, J. P. Biersack, and U. Littmark, Stopping Power and Range of Ions in Matter, edited by J. F. Ziegler (Pergamon, New York, 1985), Chap. 8.