Controlled sub-NM oxide growth and its application to high speed bipolar poly-emitter transistors

European Solid-State Device Research Conference

Volumn , Issue , 1994, Pages 51-54

  Berthold, A M ^a,c   Mulder, J G M ^b   Felde, A V ^a   Kwakman, L F Tz ^b   Weitzel, I ^a   Philipsborn, H V ^c   Klose, H ^a  

^a SIEMENS AG   (Germany)

^b ASM International NV   (Netherlands)

^c UNIVERSITY OF REGENSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH SPEED; ITS APPLICATIONS; OXIDE GROWTH;

EID: 0006747360     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)