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Applied Physics Letters
Volumn 63, Issue 26, 1993, Pages 3580-3582
Strain relief mechanism for damage growth during high-dose, O+ implantation of Si
(3)
Zhou, D S
a
Holland, O W
a
Budai, J D
a
a
OAK RIDGE NATIONAL LABORATORY
(
United States
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
0006713087
PISSN
:
00036951
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.110103
Document Type
:
Article
Times cited : (
24
)
References (
24
)
1
0342399142
(1990)
Solid State Technol.
, vol.12
, pp. 61
Hosack, H.H.
1
Houston, T.W.
2
Pollack, G.P.
3
2
0025517320
(1990)
Solid State Technol.
, vol.11
, pp. 75
Guerra, M.A.
1
3
0038850838
(1992)
Mater. Res. Soc. Bull.
, vol.6
, pp. 40
Celler, G.K.
1
White, A.E.
2
4
0017998279
(1978)
Electron Lett.
, vol.14
, pp. 593
Izumi, K.
1
Doken, M.
2
Ariyoshi, H.
3
5
5244298254
(1992)
Mater. Res. Soc. Symp. Proc.
, vol.235
, pp. 133
Lee, J.D.
1
Park, J.C.
2
Krause, S.J.
3
Roitman, P.
4
El-Ghor, M.K.
5
6
0024608023
(1989)
Mater. Sci. Eng. B
, vol.2
, pp. 111
Baumgart, H.
1
van Ommen, A.H.
2
7
0039443595
(1984)
Appl. Phys. Lett.
, vol.45
, pp. 10
Holland, O.W.
1
Sjoreen, T.P.
2
Fathy, D.
3
Narayan, J.
4
8
0026137865
(1991)
J. Mater. Res.
, vol.6
, pp. 792
Visitserngtrakul, S.
1
Krause, S.J.
2
9
0037628280
(1985)
Appl. Phys. Lett.
, vol.46
, pp. 1064
Jassaud, C.
1
Stomenos, J.
2
Margail, J.
3
Dupuy, M.
4
Blanchard, B.
5
Bruel, M.
6
10
3943107984
(1986)
Appl. Phys. Lett.
, vol.48
, pp. 794
Mao, B.Y.
1
Chang, P.H.
2
Lam, H.W.
3
Shen, B.W.
4
Kennan, J.A.
5
11
6144239626
(1987)
J. Appl. Phys.
, vol.62
, pp. 4897
Wijaranakula, W.
1
Matlock, J.H.
2
Mollenkopf, H.
3
12
5244342950
(1990)
Mater. Res. Soc. Symp. Proc.
, vol.183
, pp. 135
Visitserngtrakul, S.
1
Jung, C.O.
2
Cordts, B.F.
3
Roitman, P.
4
Krause, S.J.
5
13
0022667235
(1986)
Appl. Phys. Lett.
, vol.48
, pp. 532
Celler, G.K.
1
Hemment, P.L.F.
2
West, K.W.
3
Gibson, J.M.
4
14
0026852997
(1992)
J. Mater. Res.
, vol.7
, pp. 788
Nakashima, S.
1
Izumi, K.
2
15
0022813926
(1986)
Vaccum
, vol.36
, pp. 877
Hemment, P.L.F.
1
Reeson, K.J.
2
Kiler, J.A.
3
Chater, R.J.
4
Marsh, C.
5
Booker, G.R.
6
Celler, G.K.
7
Stoemenos, J.
8
16
0000235265
(1980)
Nucl. Instrum. Methods
, vol.174
, pp. 257
Biersack, J.
1
Haggmark, L.
2
17
0040035703
(1993)
Appl. Phys. Lett.
, vol.63
, pp. 896
Holland, O.W.
1
Zhou, D.S.
2
Thomas, D.K.
3
18
0001479104
(1963)
J. Appl. Phys.
, vol.34
, pp. 2788
Patel, J.R.
1
Chaudhuri, A.R.
2
19
32044438104
(1992)
Appl. Phys. Lett.
, vol.60
, pp. 3147
Venables, D.
1
Jones, K.S.
2
Namavar, F.
3
20
3142708481
(1988)
Rev. Mod. Phys.
, vol.60
, pp. 701
Schultz, P.J.
1
Lynn, K.G.
2
21
0043110134
(1992)
Mater. Res. Soc. Symp. Proc.
, vol.235
, pp. 103
Venables, D.
1
Jones, K.S.
2
Namavar, F.
3
Manke, J.M.
4
22
36549100876
(1988)
Appl. Phys. Lett.
, vol.53
, pp. 1282
Holland, O.W.
1
El-Ghor, M.K.
2
White, C.W.
3
23
0001221479
(1991)
Nucl. Instrum. Methods B
, vol.59
, pp. 353
Holland, O.W.
1
White, C.W.
2
24
0001991314
(1987)
Appl. Phys. Lett.
, vol.50
, pp. 95
White, A.E.
1
Short, K.T.
2
Dynes, R.C.
3
Garno, J.P.
4
Gibson, J.M.
5
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