A new method to measure the absolute -humidity independently of the ambient temperature

Sensors and Actuators, B: Chemical

Volumn 33, Issue 1-3, 1996, Pages 156-160

  Kimura, Mitsuteru ^a  

^a TOHOKU GAKUIN UNIVERSITY   (Japan)

Author keywords

Humidity sensor; Micro heater; Micro machining; Thermal conductivity; Thermal sensor

Indexed keywords

EID: 0006504756     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(96)80090-6     Document Type: Article

References (4)

1. M. Kimura, J. Manaka, S. Satoh, S. Takano, N. Igarashi and K. Nagai, Application of the air-bridge microheater to gas detection, Techn. Digest, The 5th Intern. Meeting Chem. Sensors, Rome, Italy, 1994, pp. 1164-1167.
2. M. Kimura, J. Manaka, S. Satoh, S. Takano, N. Igarashi and K. Nagai, A new type humidity sensor using micro-air-bridge heaters, in H. Reichl and A. Heuberger (eds.), Proc. Micro System Tech. '94, Verlag, Berlin, 1994, pp. 455-461.
3. K. Makita, Viscosity and Thermal Conductivity, Baifukan, Tokyo, 1975, pp. 70-153.
4. A.L. Lidsay and LA Bromley, Thermal conductivity of gas mixtures, Ind. Eng. Chem., 42 (1950).