XPS and FTIR study of silicon oxynitride thin films

Journal of the European Ceramic Society

Volumn 17, Issue 15-16, 1997, Pages 2025-2028

  Viard, J ^a   Beche, E ^b   Perarnau, D ^c   Berjoan, R ^c   Durand, J ^a  

^a UNIVERSITÉ DE MONTPELLIER   (France)

^b UNIVERSITÉ DE TECHNOLOGIE DE BELFORT MONTBÉLIARD   (France)

^c Centre National de la Recherche Scientifique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006478478     PISSN: 09552219     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0955-2219(97)00051-4     Document Type: Article

References (13)

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