Investigation of the accuracy of pyrometric interferometry in determining AlxGa1-xAs growth rates and compositions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2157-2162

  Sacks, R N ^a   Sieg, R M ^a   Ringel, S A ^a  

^a The Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006311248     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588889     Document Type: Article

References (11)

1. A. J. SpringThorpe, T. P. Humphreys, A. Majeed, and W. T. Moore, Appl. Phys. Lett. 55, 2138 (1989).
2. A. J. SpringThorpe and A. Majeed, J. Vac. Sci. Technol. B 8, 266 (1990).
3. L. P. Ramberg, J. Westin, and T. G. Andersson, J. Vac. Sci. Technol. B 5, 1654 (1987).
4. T. F. Kuech, D. J. Wolford, R. Potemski, J. A. Bradley, K. H. Kelleher, D. Van, J. P. Farrell, P. M. S. Lesser, and F. H. Pollak, Appl. Phys. Lett. 51, 505 (1987).
5. C. Bosio, J. L. Staehli, M. Guzzi, G. Burri, and R. A. Logan, Phys. Rev. B 38, 3263 (1988).
6. H. Shen, S. H. Pan, Z. Hang, J. Leng, F. H. Pollak, J. M. Woodall, and R. N. Sacks, Appl. Phys. Lett. 53, 1080 (1988).
7. D. E. Aspnes, S. M. Kelso, R. A. Logan, and R. Bhat, J. Appl. Phys. 60, 754 (1986).
8. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
9. Y. M. Houng, M. R. T. Tan, B. W. Liang, S. Y. Wang, and D. E. Mars, J. Vac. Sci. Technol. B 12, 1221 (1994).
10. F. G. Bobel, H. Moller, A. Wowchak, B. Hertl, J. Van Hove, L. A. Chow, and P. P. Chow, J. Vac. Sci. Technol. B 12, 1207 (1994).
11. H. Grothe and F. G. Boebel, J. Cryst. Growth 127, 1010 (1993).