Surface modification of oxide thin film and its gas-sensing properties

Applied Surface Science

Volumn 171, Issue 3-4, 2001, Pages 226-230

  Maosong, Tong ^a   Guorui, Dai ^a   Dingsan, Gao ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; IRON COMPOUNDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLATINUM; SEMICONDUCTING FILMS; SEMICONDUCTING TIN COMPOUNDS; SOLUTIONS; SURFACE TREATMENT; THIN FILM DEVICES; X RAY PHOTOELECTRON SPECTROSCOPY;

OXIDE THIN FILMS;

CHEMICAL SENSORS;

EID: 0006131606     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00708-X     Document Type: Article

References (13)

1. Gentry S.J., Jones T.A. Sensors and Actuators. 10:1986;141.
2. Kohl D. Sensors and Actuators B. 1:1990;158.
3. Semancik S., Fryberger T.B. Sensors and Actuators B. 1:1990;97.
4. Lalauze R., Breuil P., Pijolat C. Sensors and Actuators B. 3:1991;175.
5. Anderson J.C. J. Vac. Sci. Technol. A. 4:1986;610.
6. Demarne V., Grised A. Sensors and Actuators. 13:1988;301.
7. K. Hara, N. Hanashi, in: Proceeding of the 2nd Sensor Symposium IEEE, Japan, 1982, p. 209.
8. Guorui D., Lihua C., Bailiang Y., Mingdeng L. J. de Physique IV C. 2:1991;233.
9. Mukherjee S.P., Evans P.E. Thin Solid Films. 14:1972;105.
10. Lantto V., Romppaninen P. Surf. Sci. 192:1987;243.
11. Jiang L.Q., Koel B.E. Surf. Sci. 273:1992;273.
12. Huck R., Bottger U., Kohl K., Heiland G. Sensors and Actuators. 17:1983;355.
13. Morrison S.R. Sensors and Actuators. 12:1987;425.