Novel Functional Polymers from N-(Tosyloxy)maleimide. Photochemical Acid Generation in Solid-State and Application as Resist Materials

Chemistry of Materials

Volumn 6, Issue 8, 1994, Pages 1452-1456

  Ahn, Kwang Duk ^a   Chung, Chan Moon ^a   Koo, Deok Il ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006032563     PISSN: 08974756     EISSN: 15205002     Source Type: Journal    
DOI: 10.1021/cm00044a051     Document Type: Article

References (22)

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