Scanning force microscopy on laser ablated silicon nitride films

Acta Physica Polonica A

Volumn 91, Issue 5, 1997, Pages 1009-1014

  Vrinceanu C ^a   Flueraru, C ^a   Dinescu, M ^b   Vasile, E ^c  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b INSTITUTE OF ATOMIC PHYSICS   (Romania)

^c Metav SA Bucuresti   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006019030     PISSN: 05874246     EISSN: None     Source Type: Journal    
DOI: 10.12693/APhysPolA.91.1009     Document Type: Article

References (5)

1. M. Dinescu, N. Chitica, V.S. Teodorescu, A. Lita, A. Luches, M. Martino, A. Perrone, M. Gartner, Laser Processing: Surface Treatment and Film Deposition, Eds. J. Mazumder, O. Coude, Kluwer Academic Publ., Dordrecht 1996, p. 809.
2. A. Luches, G. Leggieri, M. Martino, A. Perrone, G. Majni, P. Mengucci, I.N. Mihailescu, Appl. Surf. Sci. 79/80, 244 (1994).
3. K.O. van der Werf, C.A.J. Putman, B.C. de Grooth, F.B. Segerink, E.H. Schipper, N.F. van Hulst, J. Greve, Rev. Sci. Instrum. 64, 2892 (1993).
4. C. Flueraru, D. Dascalu, Rom. J. Phys. 41, 295 (1996).
5. E. Fogarassy, C. Fuchs, A. Slaoui, S. de Unamuno, J.P. Stoquert, W. Marine, B. Lang, J. Appl. Phys. 76, 2612 (1994).