New insights into the kinetics of the stress-driven two-dimensional to three-dimensional transition

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2199-2202

  Chen, K M ^a   Jesson, D E ^a   Pennycook, S J ^a   Thundat, T ^a   Warmack, R J ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005997154     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588899     Document Type: Article

References (18)

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