Calculation of a AI-Ti-O-N quaternary isotherm diagram for the prediction of stable phases in TiN/AI alloy contact metallization

Journal of Applied Physics

Volumn 79, Issue 8, 1996, Pages 4468-4470

  Caron, Mario ^a   Gagnon, Gilles ^a   Fortin, Vincent ^a   Currie, John F ^a   Quellet, Luc ^b   Tremblay, Yves ^b   Biberger, Max ^c   Reynolds, Reese ^c  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b Mitel Networks Corporation   (Canada)

^c VARIAN MEDICAL SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005989134     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.361760     Document Type: Article

References (10)

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